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List of Detected Gases
| Type | Gas | Full Scale |
| XDS-7NH | NH3 | 100 ppm |
| XDS-7SH | SiH4 | 25 ppm |
| XDS-7DC | SiH2CL2 | 25 ppm |
| XDS-7AH | AoH3 | 250 ppb |
| XDS-7PH | PH3 | 1ppm |
| XDS-7BH | B2He | 500ppb |
| XDS-7SE | H2So | 250ppb |
| XDS-7GH | GeH4 | 1ppm |
| XDS-7CL | Cl2 | 5ppm |
| XDS-7CF | ClF3 | 1ppm |
| XDS-7HC | HCl | 25ppm |
| XDS-7HF | HF | 10ppm |
| XDS-7HB | HBr | 10ppm |
| XDS-7NO | NO | 100ppm |
| XDS-7HS | H2B | 50ppm |
| XDS-7CO | CO | 250ppm |
| XDS-7DS | Bi2H2 | 25ppm |
| XDS-7F2 | F2 | 5ppm |
| XDS-7OZ | O3 | 1ppm |
Specifications
| Model | XPS-7 |
| Detection Principle | Electrochemical cell |
| Gas Detected | Semiconductor manufacturing gases |
| Gas Sampling Method | Extractive |
| Detection Range | Depends on the specific action |
| Resolution | 1/100 of full scale |
| Indication Accuracy | |
| Alarm Mode | 2nd stage alarm type |
| Alarm Indication | Intermittent buzzer, flashing lamp |
| Response Time | 60 or less (60% response) |
| Operating Temperature | 0 to 40oC |
| Power Source | 4 x AA Alkaline dry cells(*2) or an AC adaptor |
| Battery Life (*2) | Up to 12 hours (by alkaline dry cells at 20oC without alarm) |
| Dimensions | W 62 x H 150 x D 128 mm (excluding protrusions) |
| Weight | Approx. 1.3 kg |
| Standard Accessories | Gas sampling hose with probe, Shoulder strap, 4 X AA alkaline dry cells, Spare filters |
| Optional Accessories | AC adaptor (100 VAC/B VDC), Sensor Stocker, Log data collection kit |